MicPLASMAS · Microscopic Plasma Sources: Novel Diagnostics and Circuit Integration

Microscopic Plasma Sources: Novel Diagnostics and Circuit Integration.

The MicPLASMAS project was a collaborative project between Prof. L. Overzet of the University of Texas at Dallas, USA and Drs. R. Dussart and P. Lefaucheux at the GREMI laboratory of the Centre National de la Recherche Scientifique in Orleans, France. The project centered on a examination of microscopic, near atmospheric pressure, cold plasmas for various applications. In particular the following objectives were specified: [1] The transfer to GREMI of radio frequency diagnostic techniques; [2] The establishment at GREMI of FTIR diagnostics of micro-plasma sources and particularly MCSDs; [3] Joint research using UV-Visible Optical Spectroscopic diagnostics of micro-plasma sources and MCSDs; [4] Joint research on integrating electronic devices with micro-plasma; and [5] Outreach activities to Polytech Orléans students as well as local high school students along the lines of the “Marie Curie Ambassador” model. Objectives [1] – [3], and [5] were successfully completed. Objective [4] was planned to be longer term. It was designed to ensure a longer term collaboration and teaming of the French and USA lab teams. Objective [1] was accomplished by extensive development of data analysis and control programs in LabVIEW using the GREMI lab computer and equipment. The GREMI team has been trained in the use of the radio-frequency diagnostic and given complete schematic information. Objective [2] was accomplished by the joint design and fabrication of an FTIR test bed. The test bed has been proven to function well and is expected to produce significant data going forward as well. Objective [3] was accomplished using the GREMI spectrometer and a variety of microplasma conditions as well as configurations. Objective [4] remains unfinished and a basis of ongoing collaboration. Finally, Objective [5] was accomplished through presentations to high school students, university students, other faculty and scientists at GREMI and CNRS as well as extensive mentoring of the primary graduate student on this project. Findings included: [1] The primary reason for premature failure of the silicon microplasma sources fabricated by the GREMI team is the ionization overheating instability. This instability is exacerbated by excess shunt capacitance inherent in the old source design. A new source was designed and is being tested which minimizes the impact of this phenomenon and has already shown expected success. [2] The FTIR diagnostics allow one to examine the dissociation and formation kinetics of chemical species clearly for microplasma sources. One can detect chemical reaction products in the ppm range with ease. [3] The radio frequency diagnostics of microplasma sources are not as useful as initially envisioned. Without this extended time to investigate the details of the radiofrequency diagnostic theory and practice, this fact would have remained hidden.

Data: CORDIS, © European Union