FP5Individual fellowship2001–2003
Implementing and calibration of integrated optical strategy for in situ metrology of micro-electro-mechanical systems
FP5 — Improving Human Research Potential
- Duration
- 2001-09-01 → 2003-08-31
- EU contribution
- €125,900
- Participants
- 1
- Scheme
- RGI
Lines connect the coordinator with its partners.
Participants
- UNIVERSITÉ DE FRANCHE-COMTÉ · BESANCONCoordinatorFrance
Links
Data: CORDIS, © European Union