H2020Индивидуална стипендия2021–2025

NanoScan · Large-stroke and high-speed nanoscanning for multi-photon polymerization 3D lithography

„Хоризонт 2020“ — Действия „Мария Склодовска-Кюри“

Период
2021-12-01 → 2025-07-11
Финансиране от ЕС
337 401 €
Участници
1
Схема
MSCA-IF

Линиите свързват координатора с партньорите.

Накратко на български

Наносканирането за 3D литография изследва създаването на механизми за по-бързо и точно изграждане на микроструктури с размери до 100 нанометра. Това помага за увеличаване на размера и ефективността на обектите, без да се губи прецизността при тяхното производство.

Този кратък обзор е генериран от изкуствен интелект

Кратко обяснение, генерирано от езиков модел по текста на CORDIS. Оригиналът е по-долу.

Резултати накратко

Large-stroke and high-speed nanoscanning for multi-photon polymerization 3D lithography

In the “Post-Moore Era”, multi-photon polymerization 3D nanolithography (MPP 3D-NL) technology, as an emerging micro/nano-machining technology, has great advantages in fabricating arbitrary 3D micro/nanostructures of various materials with nanoscale resolution (down to 100nm). Unfortunately, due to the defect of short travel range of the nanoscanners, the scientific community has to rely on “splicing” to achieve large-size MPP 3D-NL fabrication, which has greatly limited its machining accuracy and efficiency. For the purposes of MPP 3D-NL, we focus on three specific aspects: accuracy, efficiency, and size. In all these respects, efficiency and size play a crucial role, but they are also a pair of contradictions. The NanoScan project aims to improve the understanding of the nanoscanning system in response to large-stroke, cross-decoupling, cooperative nanopositioning control and their roles in the surface-forming fabrication and high-efficiency micro/nano-machining. For this project, it aims to address the following objectives: 1. To use flexure-based compliant mechanisms and ultra-precision actuators to develop large-stroke nanopositioning mechanisms. 2. To optimize the key components, including theoretical and experimental research activities on the optimal design and control methodologies of the NanoScan system. 3. To develop a closed-loop and high-bandwidth control method to achieve multidimensional and cross-scale cooperative nanopositioning. 4. To conduct experimental validation and optimisation to verify the proposed large-stroke nanopositioning mechanisms and high-rate controlling algorithms. 5. To disseminate and transfer the achievements to wider communities, including academia and industry, through conferences, journal papers, and seminars/workshops, internet presence and further exploit them for commercialization.

Текст от CORDIS, на английски · Данни: CORDIS, © Европейски съюз

Цел на проекта

Multi-photon polymerization 3D nanolithography (MPP 3D-NL) technology has great advantages in fabricating arbitrary 3D micro/nanostructures of various materials with nanoscale resolution. However, how to simultaneously achieve large-size and high-efficiency fabrication has become a very challenging issue for the MPP 3D-NL fabrication due to the shortcoming of small workspace of the nanoscanning system. At present, the scientific community has to rely on “splicing” to achieve large-size fabrication, which leads to the machining accuracy and efficiency are greatly limited. Recent requirements on additive manufacturing and 3D nano lithography aggravate these challenges. This proposal aims at realizing the large-size 3D micro/nanostructures machining and guaranteeing the high quality MPP 3D-NL fabrication by developing of a set of nanoscanning system with cubic centimeter workspace. By developing of bio-inspired wheel-type nanomotor, WTM-actuated XYZ nanoscanner, laser scanning galvanometer with vibration self-damping property, array surface-forming technics and double closed-loop high-bandwidth control strategy, difficulties in MPP 3D-NL fabrication could be well treated. Taking advantages of the novel, high-quality and multidisciplinary features of this programme, high-impact and fruitful outcomes are expected to be produced with improved performance of MPP 3D-NL fabrication technique in practice. This project brings together an experienced scientist with a unique skill set of flexure-based nanoscanning with an internationally recognized research group with expertises in precision mechanisms and micro/nano manipulations. The developments in the project could accelerate the candidate’s career development as a leading independent scientist and could enhance the reputation of the host institute. It would be also helpful to strengthen the European leadership in the field of advanced micro/nano manufacturing.

Оригинален текст от CORDIS (на английски).

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Данни: CORDIS, © Европейски съюз